Experimental Study on Magnetorheological Chemical Polishing for Sapphire Substrate

YIN Shaohui, WANG Yongqiang, LI Yepeng, KANG Renke, CHEN Fengjun, HU Tian

Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (5) : 80-87.

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Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (5) : 80-87. DOI: 10.3901/JME.2016.05.080

Experimental Study on Magnetorheological Chemical Polishing for Sapphire Substrate

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 52(5): 80-87 https://doi.org/10.3901/JME.2016.05.080

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