Analysis of the Effect of Phosphorus Doping on the Lifetime of the Single Crystal Silicon Micro-beam Based on Paris Formula

LIU Bin;TAO Junyong;ZHANG Yunan;CHEN Xun;WANG Xiaojing

Journal of Mechanical Engineering ›› 2014, Vol. 50 ›› Issue (24) : 86-92.

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Journal of Mechanical Engineering ›› 2014, Vol. 50 ›› Issue (24) : 86-92. DOI: 10.3901/JME.2014.24.086
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Analysis of the Effect of Phosphorus Doping on the Lifetime of the Single Crystal Silicon Micro-beam Based on Paris Formula

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 50(24): 86-92 https://doi.org/10.3901/JME.2014.24.086

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