基于区间温度补偿与数据融合的硅微谐振式加速度计零偏稳定性优化技术
李挺, 周吴, 李贺, 张炳磊, 马青山, 李昂, 马忠睿, 魏朝立, 冉龙骐
Bias Stability Optimization Technique for Silicon Micro-resonant Accelerometer Based on Interval Temperature Compensation and Data Fusion
LI Ting, ZHOU Wu, LI He, ZHANG Binglei, MA Qingshan, LI Ang, MA Zhongrui, WEI Zhaoli, RAN Longqi
机械工程学报
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2026, (10): 62
-72
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DOI: 10.3901/JME.260491
