蓝宝石基片的磁流变化学抛光试验研究
尹韶辉, 王永强, 李叶鹏, 康仁科, 陈逢军, 胡天
Experimental Study on Magnetorheological Chemical Polishing for Sapphire Substrate
YIN Shaohui, WANG Yongqiang, LI Yepeng, KANG Renke, CHEN Fengjun, HU Tian
机械工程学报
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2016, (5): 80
-87
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DOI: 10.3901/JME.2016.05.080
