基于动磁场磁流变效应抛光方法,采用微型压电式传感器测试分析动磁场磁流变效应抛光垫法向抛光力特性,研究磁极转速、加工间隙、工件运动方式对动磁场磁流变效应抛光力的影响。结果表明,动磁场磁流变效应平面抛光法向力在抛光垫中心区域最大,pv值在抛光垫的半径6 mm处最大;相对静磁场,在磁极转动的动磁场作用下磁流变抛光力和扭矩呈现大幅度波动的动态行为;动磁场磁流变效应抛光力受到磁极转速影响,大于15 r/min开始产生动磁场,在试验所测得的范围内,磁极转速30 r/min左右有最好效果;工件运动方式是影响磁流变抛光作用力的因素,当工件沿抛光盘径向往复偏摆时扭矩剧烈变化,沿抛光盘法向运动加工间隙减小时抛光法向力会瞬间急剧增大,最大峰值达到稳态值的25倍。
Based on the dynamic magnetic field magnetorheological effect(DMFME) polishing technology, the characteristics of polishing normal force of DMFME polishing pad is tested and analyzed by the micro piezoelectric sensor. The influences of the revolving speeds of magnetic pole, the machining gaps, the movement methods of workpiece on the polishing force are researched. It is found that the maximal MR effect plane polishing normal force of DMFME appeared on the central zone, but the maximal pv value came up in the radius of 6 mm. Compared with the static magnetic field, the MR polishing force and the torque presented significant dynamic behavior under the dynamic magnetic field formed by the rotating magnetic pole. The dynamic magnetic field became more remarkable when the revolving speed of magnetic pole greater than 15 r/min, and the best DMFME is acquired when the speed is 30 r/min. The movement methods of workpiece also affected the DMFME polishing force. The torque is varied violently when the workpiece oscillated along the polishing plate. The normal force of DMFME polishing drastically increased when the machining gaps is reduced, its maximum peak reached 25 times of the steady state value.
[1] LIU X,LU H,CHEN Q,et al. Study on the preparation and properties of silicone oil-based magnetorheological fluids[J]. Materials and Manufacturing Processes,2013,28(6):631-636.
[2] 王永强,尹韶辉,魏长青,等. 高效磁流变平整加工中的励磁装置优化及试验研究[J]. 机械工程学报,2015,51(17):184-193. WANG Yongqiang,YIN Shaohui1,WEI Changqing,et al. Optimization of magnetic excitation unit in high efficiency magnetorheological planarization and experimental study[J]. Journal of Mechanical Engineering,2015,51(17):184-193.
[3] 潘继生,阎秋生,徐西鹏,等. 单晶SiC基片的集群磁流变平面抛光加工[J]. 中国机械工程,2013,24(18):2495-2499. PAN Jisheng,YAN Qiusheng,XU Xipeng,et al. Cluster magnetorheological effect plane polishing on SiC single crystal slice[J]. China Mechanical Engineering,2013,24(18):2495-2499.
[4] YAN Qiusheng,YAN Jiewen,XU Xipeng,et al. Ultra smooth planarization technique based on the cluster magnetorheological effect[J]. Advanced Materials Research,2010(35):18-23.
[5] 潘继生,阎秋生,路家斌,等. 集群磁流变平面抛光加工技术[J]. 机械工程学报,2014,50(1):205-212. PAN Jisheng,YAN Qiusheng,LU Jiabin,et al. Cluster magnetorheological effect plane polishing technology[J]. Journal of Mechanical Engineering,2014,50(1):205-212.
[6] PAN Jisheng,YU Peng,YAN Qiusheng,et al. An experimental analysis of strontium titanate ceramic substrates polished by magnetorheological finishing with dynamic magnetic fields formed by rotating magnetic poles[J]. Smart Materials and Structures,2017,26(5):055017.
[7] SCHINHAERL M,VOGT C,GEISS A,et al. Forces acting between polishing tool and workpieces surface in magnetorheological finishing[C]//Optical Engineering+ Applications. International Society for Optics and Photonics,California,2008:706006-706006-12.
[8] SHOREY A B,JACOBS S D,KORDONSKI W I,et al. Experiments and observations regarding the mechanisms of glass removal in magnetorheological finishing[J]. Applied Optics,2001,40(1):20-33.
[9] JUNG B,JANG K,MIN B K,et al. Magnetorheological finishing process for hard materials using sintered iron-CNT compound abrasives[J]. International Journal of Machine Tools & Manufacture,2009(49):407-418.
[10] MIAO C,LAMBROPOULOS J C,JACOBS S D. Process parameter effects on material removal in magnetorheological finishing of borosilicate glass[J]. Applied Optics,2010,49(10):1951-1963.
[11] GUO H,WU Y B,LU D,et al,et al. Effects of pressure and shear stress on material removal rate inultra-fine polishing of optical glass with magnetic compound fluid slurry[J]. Journal of Materials Processing Technology,2014,214:2759-2769.
[12] 潘继生,阎秋生,高伟强,等. 磁流变柔性抛光垫的动态磁场自锐抛光装置及其抛光方法:中国,201510801886.4[P]. 2015-11-18. PAN Jisheng,YAN Qiusheng,GAO Weiqiang,et al. One test device and method for polishing mechanism of dynamic magnetic field under static magnetic:China,201510801886.4[P]. 2015-11-18.
[13] 白振伟,阎秋生,徐西鹏. 集群磁流变效应平面抛光力特性试验研究[J]. 机械工程学报,2015,51(15):190-197. BAI Zhenwei,YAN Qiusheng,XU Xipeng. Experimental investigations into forces acting between cluster MR effect pad and workpiece surface[J]. Journal of Mechanical Engineering,2015,51(15):190-197.
[14] 计时明,李堔,谭大鹏,等. 基于Preston方程的软性磨粒流加工特性[J]. 机械工程学报,2011,47(17):156-163. JI Shiming,LI Chen,TAN Dapeng,et al. Study on machinability of softness abrasive flow based on preston equation[J]. Journal of Mechanical Engineering,2011,47(17):156-163.