仪器科学与技术

典型位移传感器分类研究与时栅传感器特点分析

  • 彭东林 ,
  • 付敏 ,
  • 陈锡侯 ,
  • 刘小康 ,
  • 汤其富 ,
  • 武亮
展开
  • 1. 重庆理工大学机械检测技术与装备教育部工程研究中心 重庆 400054;
    2. 重庆理工大学时栅传感及先进检测技术重庆市重点实验室 重庆 400054
付敏,男,1981年出生,博士,副研究员。主要研究方向为智能仪器与传感器。E-mail:fum_0@cqut.edu.cn

收稿日期: 2017-06-26

  修回日期: 2017-12-06

  网络出版日期: 2018-05-20

基金资助

国家自然科学基金(51475063,51675071)、重庆市科委(sy40002)和重庆市“两江学者”计划资助项目。

Classification Study on Typical Displacement Sensors and Analysis on the Characteristics of Time Grating Sensors

  • PENG Donglin ,
  • FU Min ,
  • CHEN Xihou ,
  • LIU Xiaokang ,
  • TANG Qifu ,
  • WU Liang
Expand
  • 1. Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing 400054;
    2. Chongqing Key Laboratory of Time-grating Sensing and Advanced Testing Technology, Chongqing University of Technology, Chongqing 400054

Received date: 2017-06-26

  Revised date: 2017-12-06

  Online published: 2018-05-20

摘要

对现有广泛使用的主要位移传感器和全新原理的时栅位移传感器,按其测量基准、测量原理、数学模型和刻划媒介等方面的不同进行了科学分类,分析其间的联系与差别、优势与不足、各自适用的场合等技术特征。介绍时栅在测量原理上的先进性,经权威部门——中国测试技术研究院检定:目前圆式、直线式时栅的测量精度分别达到±0.8″、±0.5 μm/m,分辨力分别达到0.1″、0.1 μm。为了使时栅的测量精度向纳米级测量精度迈进,对基于电场和光场原理的纳米时栅进行了分析。另外对时栅的衍生技术-寄生式时栅及其在极端特殊环境下的应用前景进行了简单介绍。

本文引用格式

彭东林 , 付敏 , 陈锡侯 , 刘小康 , 汤其富 , 武亮 . 典型位移传感器分类研究与时栅传感器特点分析[J]. 机械工程学报, 2018 , 54(10) : 36 -42 . DOI: 10.3901/JME.2018.10.036

Abstract

The mostly applied displacement sensors and time grating sensors with novel measurement principles are classified according to measurement standard, measurement principles, mathematical models and manufacturing materials. In addition, the similarity, the differences, the benefits and the disadvantages of these sensors are analyzed, as well as their applications. The advances in measurement principles of time grating sensors are introduced, the testing results of time grating from National Institute of Measurement and Testing Technology(NIMTT), an institute of legal verification of China, are that the indication errors are within ±0.8″ in any 0°-360° measuring range for angular time grating sensors, and the accuracy of linear time grating is ±0.5 μm/m. The resolutions can reach 0.1″and 0.1 μm, respectively. In order to further improve the accuracy of time grating up to nanometer scale, the nanometer time grating sensors based on the principles of electrical field and optical field are analyzed. In addition, derivative technology of time grating sensors, parasitic time grating sensors, and its application prospects for extreme environments are introduced.

参考文献

[1] 彭东林. 时栅位移传感器与新型机床动态监测系统[M]. 北京:科学出版社, 2010. PENG Donglin. Time grating displacement sensors and novel dynamic testing system for machine tool[M]. Beijing:Science Press, 2010
[2] 彭东林, 刘成康, 谭为民. 时空坐标转换理论与时栅位移传感器研究[J]. 仪器仪表学报, 2000, 21(4):338-342. PENG Donglin, LIU Chengkang, TAN Weimin. Study on the theory of time-space coordinate transformation and the time grating displacement sensor[J]. Chinese Journal of Scientific Instument,2000,21(4):338-342.
[3] 唐文彦. 传感器[M]. 北京:机械工业出版社,2007. TANG Wenyan. Sensor[M]. Beijing:China Machine Press,2007.
[4] 吴冰,杨军,苑勇贵,等. 单频长基线激光干涉仪的在线稳定性监测方法[J].中国激光,2012,39(6):0608003-1-0608003-6. WU Bing, YANG Jun, YUAN Yonggui, et al. Online stability monitoring technology of long-baseline homodyne[J]. Chinese Journal of Lasers,2012,39(6):0608003-1- 0608003-6.
[5] 曲兴华,王丽华. 基于激光技术的亚纳米级位移测量系统的研究[J]. 仪器仪表学报,2010,31(6):1276-1281. QU Xinghua,WANG Lihua. Research on a sub-nanometer displacement measuring system based on laser technology[J]. Chinese Journal of Scientific Instument,2010,31(6):1276-1281.
[6] KIKUCHI Y, NAKAMURA F, WAKIWAKA H, et al. Consideration for a high resolution of magnetic rotary encoder[J]. IEEE Transactions on Magnetics, 1996,32:4959-4961.
[7] KIKUCHI Y, NAKAMURA F, WAKIWAKA H, et al. Index phase output characteristics of magnetic rotary encoder using a magneto-resistive element[J]. IEEE Transactions on Magnetics, 1997, 33:3370-3372.
[8] 朱江平,胡松,于军胜,等. 基于叠栅条纹的光刻对准理论分析及标定方法[J]. 光学学报,2012,32(6):0607001-1-0607001-7. ZHU Jiangping, HU Song, YU Junsheng. Theoretical analysis of photolithography alignment and calibration method based on moiré fringes[J]. Acta Optica Sinica, 2012, 32(6):0607001-1-0607001-7.
[9] 王聪,杜丽,张军伟,等. 采用改进型的单神经元PID控制算法提高光栅拼接精度的方法[J]. 中国激光,2012,39(5):0502014-1-0502014-5. WANG Cong, DU li, ZHANG Weijun, et al. Advancing precision of grating tiling with modified single neuron adaptive pid control algorithm[J]. Laser Interferometer. Chinese Journal of Lasers, 2012, 39(5):0502014-1- 0502014-5.
[10] 唐路路,胡松,徐峰,等. 一种数字光栅无掩模光刻对准方法[J]. 中国激光,2012,39(3):03160021-0316002-6. TANG Lulu, HU Song, XU Feng, et al. A digital-grating- based alignment technique in maskless lithography[J]. Chinese Journal of Lasers, 2012, 39(3):0316002-1- 0316002-6.
[11] 张京娟,张仲毅,刘俊成. 一种新型的旋转变压器测角误差标定技术[J]. 仪器仪表学报,2010,31(1):149-153. ZHANG Jingjuan,ZHANG Zhongyi,LIU Juncheng. Novel method of calibrating the angle-measurement error of resolver[J]. Chinese Journal of Scientific Instument,2010,31(1):149-153.
[12] 尚静,徐谦. 轴向磁场单对极旋转变压器变磁阻原理分析[J]. 哈尔滨工业大学学报,2011,43(11):70-74. SHANG Jing, XU Qian. Analysis of the principle of one pair pole axial-flux resistance resolver[J]. Journal of Harbin Institute of Technology, 2011, 43(11):70-74.
[13] 彭东林,刘小康,张兴红,等. 时栅位移传感器原理与发展历程[J]. 重庆理工大学学报,2010,10:40-45. PENG Donglin, LIU Xiaokang, ZHANG Xinhong, et al.The principle and development process of time grating sensor[J]. Journal of Chongqing University of Technology, 2010,10:40-45.
[14] DENG Xingqiao, ZHU Weibing, CHEN Yonghong, et al. Optimal design for an end face engagement worm gear with multiple worm-wheel meshing[J]. Chinese Journal of Mechanical Engineering, 2017, 30(1):144-151.
[15] DENG Xingqiao, WANG Jueling, WANG Jinge, et al. Parametric analysis of the end face engagement worm gear[J]. Chinese Journal of Mechanical Engineering, 2015, 28(6):1177-1185.
[16] 彭东林, 李彦, 付敏, 等. 用于极端和特殊条件下机械传动误差检测的寄生式时栅研究[J]. 仪器仪表学报,2013,34(2):359-365. PENG Donglin, LI yan, FU Min, et al. Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment[J]. Chinese Journal of Scientific Instument, 2013, 34(2):359-365.
文章导航

/