机械工程学报 >

2015 , Vol. 51 >Issue 12: 1 - 7

DOI: https://doi.org/10.3901/JME.2015.12.001

仪器科学与技术

空气耦合Lamb波在单晶硅中的传播特性和缺陷检测研究

  • 何存富 ,
  • 刘岳鹏 ,
  • 刘增华 ,
  • 吴斌
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  • 北京工业大学机械工程与应用电子技术学院 北京 100124

网络出版日期: 2015-06-20

基金资助

国家自然科学基金(11372016, 51235001, 11272021)和北京市属高等学校高层次人才引进与培养计划(CIT&TCD201304048)资助项目

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Air-coupled Lamb Waves Propagation Characteristics and Defect Detection in Monocrystalline Silicon

  • HE Cunfu ,
  • LIU Yuepeng ,
  • LIU Zenghua ,
  • WU Bin
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  • College of Mechanical Engineering and Applied Electronics Technology,Beijing University of Technology, Beijing 100124

Online published: 2015-06-20

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摘要

单晶硅是制造硅太阳能电池的主要材料之一，但其中的各类缺陷对其光电转换效率影响颇大。针对这些问题，采用空气耦合Lamb波检测方法对单晶硅产品的质量进行快速评价。理论计算Lamb波在各向异性的单晶硅中的频散曲线，得到Lamb波在不同方向上的理论速度分布；利用空气耦合超声传感器在(001)晶面的单晶硅中激励出A0模态的Lamb波，研究200 kHz频率下Lamb波的入射角度与信号幅值的关系，确定最优入射角度为13°。采用相位谱的方法计算A0模态的相速度，试验结果与理论值吻合良好。利用波包幅值法和相关函数法分别计算A0模态的群速度，结果说明相关函数法测得的群速度与理论值误差更小；采用扫描方法对单晶硅进行缺陷检测，通过计算接收信号与参考信号的相关系数，确定出缺陷的位置和大小。

关键词： 单晶硅; 空气耦合; Lamb波; 相关系数; 缺陷检测

本文引用格式

何存富 , 刘岳鹏 , 刘增华 , 吴斌 . 空气耦合Lamb波在单晶硅中的传播特性和缺陷检测研究[J]. 机械工程学报, 2015 , 51(12) : 1 -7 . DOI: 10.3901/JME.2015.12.001

Abstract

Monocrystalline silicon is one of the main materials that is used to make silicon solar cells. However, all kinds of defects existing in monocrystalline silicon have a great influence on the photoelectric conversion efficiency. In order to solve this problem, air-coupled Lamb waves testing method is proposed to achieve rapid quality evaluation of monocrystalline silicon products. The dispersion curves of Lamb waves in anisotropic monocrystalline silicon are calculated theoretically. The velocity distribution of Lamb waves at different directions is obtained. A0 mode of Lamb waves is excited in the monocrystalline silicon of (001) crystal plane by the air-coupled transducers. The relationship between the incident angle of Lamb waves and the amplitude of signal at 200 kHz is investigated，by which 13° is chosen as the optimal incident angle. The phase velocity is calculated by phase spectrum method. Experiment results show a great agreement with those theoretical values. The group velocity is measured by amplitude of wave packet method and the correlation function method. The deviation by the latter method is smaller to acquire the group velocity. Scanning method is used to detect the defect in the monocrystalline silicon. The location and size of the defect is reconstructed by calculating the correlation coefficient of the received signals and reference signals.

Key words： monocrystalline silicon; air-coupled; Lamb waves; correlation coefficient; defect detection

参考文献

[1]    张舞杰, 李迪, 叶峰. 硅太阳能电池视觉检测方法研究[J]. 计算机应用，2010, 30(1)：249-252.

         ZHANG Wujie, LI Di, YE Feng. Investigation of visual inspection method for silicon solar cell[J]. Journal of Computer Applications, 2010, 30(1)：249-252.

 [2]  HAUNSCHILD J, GLATTHAAR M, DEMANT M, et al. Quality control of as-cut multicrystalline silicon wafers using photoluminescence imaging for solar cell production[J]. Solar Energy Materials and Solar Cells, 2010, 94(12)：2007-2012.

 [3]  FUYUKI T, KITIYANAN A. Photographic diagnosis of crystalline silicon solar cells utilizing electroluminescence [J]. Applied Physics A, 2009, 96(1)：189-196.

 [4]  BALOGUM O, COLE G D, HUBER R, et al. High-spatial- resolution sub-surface imaging using a laser-based acoustic microscopy technique[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2011, 58(1)：226-233.

 [5]  BELYAEV A, POLUPAN O, DALLAS W, et al. Crack detection and analyses using resonance ultrasonic vibrations in full-size crystalline silicon wafers[J]. Applied Physics Letters, 2006, 88(11)：111907.

 [6]  ROSE J L. A baseline and vision of ultrasonic guided wave inspection potential[J]. Journal of Pressure Vessel Technology, 2002, 124(3)：273-282.

 [7]  MEIER R, ZELLER U. Lamb wave based yield strength characterization of solar cell interconnectors [C]//2013 ICU Organisers, Proceedings of the 2013 International Congress on Ultrasonics. Singapore：Research Publishing, 2013：112-117.

 [8]  周正干, 魏东. 空气耦合式超声波无损检测技术的发展[J]. 机械工程学报，2008, 44(6)：10-14.

         ZHOU Zhenggan, WEI Dong. Progress of air-coupled ultrasonic non-destructive testing technology[J]. Chinese Journal of Mechanical Engineering, 2008, 44(6)：10-14.

 [9]  LIU Zenghua, YU Hongtao, HE Cunfu, et al. Dela- mination detection in composite beams using pure Lamb mode generated by air-coupled ultrasonic transducer[J]. Journal of Intelligent Material Systems and Structures， 2014, 25(5)：541-550.

[10]  SONG M, JHANG K. Crack detection in single-crystalline silicon wafer using laser generated Lamb wave[J]. Advances in Materials Science and Engineering，2013(2)：1-6.

[11]  CHAKRAPANI S K, PADIYAR M J, BALASUBRA- MANIAM K. Crack detection in full size Cz-Silicon wafers using Lamb wave air coupled ultrasonic testing (LAC-UT)[J]. Journal of Nondestructive Evaluation，2012, 31(1)：46-55.

[12]  HOPCROFT M A, NIX W D, KENNY T W. What is the Young’s modulus of silicon[J]. Journal of Microelectro- mechanical Systems, 2010, 19(2)：229-238.

[13]  TURLEY J, SINES G. The anisotropy of Young’s modulus, shear modulus and poisson’s ratio in cubic materials[J]. Journal of Physics D：Applied Physics, 1971, 4(2)：264-271.

[14]  SU Zhongqing, YE Lin, LU Ye. Guided Lamb waves for identification of damage in composite structures：A review[J]. Journal of Sound and Vibration, 2006, 295(3-5)：753-780.

[15]  SOLODOY I, DÖRING D, BUSSE G. Air-coupled Lamb and Rayleigh waves for remote NDE of defects and material elastic properties[J]. Strojniski Vestnik-Journal of Mechanical Engineering, 2010, 56(9)：557-564.

[16]  LIU Zenghua, YU Hongtao, HE Cunfu, et al. Delamination damage detection of laminated composite beams using air-coupled ultrasonic transducers[J]. Science China Physics, Mechanics and Astronomy, 2013, 56(7)：1269-1279.

[17]  CASTAINGS M, HOSTEN B. Lamb and SH waves generated and detected by air-coupled ultrasonic transducers in composite material plates[J]. NDT&E International, 2001, 34(4)：249-258.

[18]  刘增华, 余锋祥, 于洪涛, 等. 基于群速度校准的超声导波技术及在复合材料缺陷检测中的应用[J]. 机械工程学报，2012, 48(20)：8-15.

         LIU Zenghua, YU Fengxiang, YU Hongtao, et al. Ultrasonic guided wave technology based on group velocity calibration and its application for defect detection in composite plates[J]. Journal of Mechanical Engineering, 2012, 48(20)：8-15.

[19]  HAY T R, ROYER R L, GAO H, et al. A comparison of embedded sensor Lamb wave ultrasonic tomography approaches for material loss detection[J]. Smart Materials and Structures, 2006, 15(4)：946-951.

[20]  OZAKI Y, KAWAGUCHI T, TAKEDA Y, et al. High time resolution ultrasonic velocity profiler[J]. Experimental Thermal and Fluid Science, 2002, 26(2)：253-258.

[21]  CEPEL R, HO K, RINKER B, et al. Spatial correlation coefficient images for ultrasonic detection[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2007, 54(9)：1841-1850.

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