提出一种以硅片传输机器人末端竖直方向上由手臂静变形引起的静偏移为约束、以刚性杆柔性关节系统固有频率为优化目标、以各手臂壁厚为优化参数的硅片传输机器人手臂结构优化设计方法。建立硅片传输机器人刚性杆柔性关节动力学模型，通过系统固有频率分析以及模态分析确定对轨迹精度影响较大的模态为一阶模态与二阶模态；通过分析结构参数对一阶与二阶固有频率影响的灵敏度以及权值选择小臂与末端手臂的质量作为优化参数；建立以手臂厚度为变量、以手臂结构尺寸为约束的手臂挠度模型与末端竖直方向静偏移模型，分析手臂厚度对末端竖直方向静偏移的影响规律并对末端手臂与小臂的厚度尺寸进行优化设计；对结构优化设计前后硅片传输机器人手臂的性能进行对比分析。结果表明：该方法在大幅度降低手臂质量的同时可显著提高硅片传输机器人手臂的一阶与二阶固有频率，大幅度降低了末端竖直方向上的静态偏移及内应力，大幅提高了系统竖直方向上的振动频率。

A method for structural optimization design of wafer handling robot is presented. The static deformation of the end effector is employed as the constraint of the method. The nature frequencies of the rigid links flexible joints system are selected as the optimization objectives, and the thicknesses of the arms are determined as the optimization parameters. The dynamic model of the rigid links and flexible joints is established, and the modal analysis is carried out to determine the orders of the modal which will influence the trajectory precision. The masses of the second arm and the third arm are selected as the optimization parameters by the sensitive analysis of the nature frequencies. The deflection model of the arm is established with the variables of the thicknesses of the arm. The relationships between the thicknesses and the deformation of the end effector are analysed, and the structures of the arms are optimized based on the analysis. The comparison between the performance before optimization and the performance after optimization are carried out, and the result shows that the nature frequencies and the frequency of the vertical vibration are significantly enhanced and the deflection of the end effector is obviously reduced.