针对磁悬浮分子泵转子在高速运转时章动模态造成的失稳问题，提出一种基于交叉反馈的章动相位裕度跟踪补偿控制方法。利用磁悬浮转子系统的复系数建模方法，定量分析闭环控制作用下扁平转子的阻尼章动频率，确立章动频率与控制系统参数及转速间的解析关系，设计自适应滤波器跟踪提取章动频率信号，应用于交叉反馈的章动控制通道，实现全转速范围内对章动相位裕度的跟踪补偿控制。仿真结果表明，章动频率解算精确，基于交叉反馈的章动模态控制方法可有效解决磁悬浮高速转子全转速范围内的章动模态稳定控制问题。最后，将所提方法应用于所研制的大抽速磁悬浮分子泵控制系统，章动模态振动幅值被抑制在-60 dB以下，消除了章动模态对控制系统稳定性的影响，确保了磁悬浮分子泵长期可靠运行。
Aiming at the problem of instability caused by nutation mode in the high speed operation of magnetic suspension rotor, a nutation phase margin tracking compensation control method based on cross feedback is proposed. By using the complex coefficient modeling method, the damping nutation frequency of the flat rotor under closed loop control is quantitatively analyzed. The analytic relationship between nutation frequency, control system parameters and rotational speed is also established. The adaptive tracking filter is used to track and extract nutation frequency signals, which is applied to the nutation control channel of cross feedback. In the whole speed range, the tracking compensation control of nutation phase margin is realized. The simulation results show that the nutation frequency calculation is accurate, and the nutation control method based on cross feedback can effectively solve the nutation mode stability control problem in the full speed range of the high-speed magnetically suspended rotor. Finally, the proposed method is applied to the high speed rotor control system of the large-scale turbo molecular pump. Experimental results show that the nutation magnitude is suppressed below -60 dB. The proposed method eliminates the impact of the nutation mode on the stability of the control system and ensures the long-term stable operation of the turbo molecular pump.
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