低频振动对高精度加工和测量都有严重不利影响，被动隔振方法无法有效减小低频振动，精确测量低频振动是主动隔振的前提。研制了一种基于DVD光学读取头的悬臂式低频加速度计。介绍了低频加速度计的检测原理和结构；将市售DVD光学读数头改装成了高精度位移传感器；在分析和反复优化的基础上确定了悬臂梁式弹簧片合适的材料和结构参数。以自制振动台为振源，高精度低漂移的电涡流传感器（分辨率0.07 nm）作为基准，对所研制的加速度计进行了标定，结果为灵敏度9.26 V/g，频率响应范围3～10 Hz，加速度测量范围0.4～32.8 mg，10次测量标准差优于0.01 mg，共振频率44 Hz。可以用于低频微小振动的检测。
李瑞君
,
常振鑫
,
雷英俊
,
胡鹏浩
,
范光照
. 基于DVD光学读取头的悬臂式低频加速度计[J]. 机械工程学报, 2019
, 55(2)
: 10
-17
.
DOI: 10.3901/JME.2019.02.010
Low-frequency vibration has a destructive impact on high-precision machining and measurement, which is difficult to be reduced effectively by passive isolation. High precision measurement for low-frequency vibration is the first step of active isolation. A cantilever type low-frequency acceleration sensor based on DVD optical pickup is proposed. The design principle and structure of low-frequency accelerator are introduced. A high precision displacement sensor is modified from DVD pickup head. An elastic cantilever beam is used to sensor the vibration,which was analyzed and optimized iteratively and the proper material, sizes and natural frequency of the beam were obtained. The signal processing circuits are also finished. A homemade vibration generator is used as an exciter, and a high-precision eddy current sensor is used as a standard. The experimental results show that the accelerometer has a sensitivity of 9.26 V/g, a measuring frequency of 3~10 Hz, a measurement range of 0.4~32.8 mg, a measurement standard deviation of less than 0.01 mg, and a resonance of 44 Hz. It can be used to detect the low frequency micro vibrations.
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