针对航天有效载荷微波部件频发的微放电现象，采用微陷阱表面构型来抑制微波材料表面的二次电子发射，从而达到微放电抑制效果。通过硅基材料的表面刻蚀和金属Ag的表面溅射获得规整的金属表面微陷阱结构，将表面处理过的金属样品在二次电子发射平台的电子枪20~4 000 eV照射下，采用电流法获得金属微陷阱表面的二次电子产额曲线及抑制特性。此外，通过将表面出射的二次电子分为弹性背散射电子、非弹性背散射电子和本征二次电子，并跟踪电子在陷阱结构内的级联再入射过程，建立表面圆柱孔和矩形槽微陷阱表面的二次电子发射数值模型，模拟结果与测试结果能很好吻合。采用数值模拟的方法构造不同深宽比的微陷阱结构表面，最大二次电子产额、第一交叉能量以及微放电品质因子的变化规律。研究结果表明：陷阱结构的侧壁遮挡效果能有效抑制二次电子从表面发射，并且深宽比越大的表面陷阱结构抑制效果更强，而在相同深宽比情况下，圆柱孔陷阱结构比矩形槽陷阱结构对二次电子的抑制效果更好，此外，陷阱结构的深宽比不仅能使得最大二次电子产额减小、第一交叉能量增大，还会近线性地增大材料的微放电品质因子F。
封国宝
,
崔万照
,
胡天存
,
陈邦道
,
王宁
. 基于表面构型的二次电子发射及微放电特性研究[J]. 机械工程学报, 2018
, 54(9)
: 121
-127
.
DOI: 10.3901/JME.2018.09.121
With the purpose of suppressing multipactor discharges in spacecraft, a kind of micro-trap structure is proposed to reduce hold secondary electron emission from the sample surface. After etching structure on the surface and spurting metals on its structure surface, samples with micro-trap structure on its surface are obtained and tested their secondary electron emission characteristics in a testing platform(20~4 000 eV). In addition, a numerical simulation model is built with dividing the emitted electron into the elastic backscattering electrons, the inelastic backscattering electrons and the true secondary electrons. Numerical simulation results agree well with experimental results. Experimental and simulation results show that those micro-trap structure can help suppress secondary electron emission effectively, and the depth-to-width ratio of structure will enhance the effect of suppression as well. Surface structure with a cylindrical hole resist the secondary electron emission better than the surface structure with rectangle groove when their depth-to-width ratios are the same. Furthermore, a sample with a larger depth-to-width ratio can not only corresponds a less maximum secondary electron yield and a larger first cross energy, but also improve the quality factor of multipactor discharge F linearly.
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