单晶硅放电成形切割-电解组合加工建模分析与实验研究

机械工程学报 ›› 2026, Vol. 62 ›› Issue (1) : 436-447. DOI: 10.3901/JME.260032

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Modeling Analysis and Experimental Research on Discharge Forming Cutting-electrochemical Combined Machining of Single Crystalline Silicon

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2026, 62(1): 436-447 https://doi.org/10.3901/JME.260032

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 62(1): 436-447 https://doi.org/10.3901/JME.260032

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