单晶金刚石衬底超精密加工损伤层无损测量与表征

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机械工程学报 ›› 2024, Vol. 60 ›› Issue (4) : 239-249. DOI: 10.3901/JME.2024.04.239

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Non-destructive Measurement and Characterization of Damage Layer of Single-crystal Diamond Substrate after Ultra-precision Machining

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2024, 60(4): 239-249 https://doi.org/10.3901/JME.2024.04.239

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(4): 239-249 https://doi.org/10.3901/JME.2024.04.239

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