多级触发脉冲电弧源技术制备掺氮ta-C薄膜的力学性能研究

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机械工程学报 ›› 2023, Vol. 59 ›› Issue (24) : 108-117. DOI: 10.3901/JME.2023.24.108

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Study on Mechanical Properties of Nitrogen-doped ta-C Thin Films Prepared by Multi-stage Triggered Pulsed Arc Source Technology

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2023, 59(24): 108-117 https://doi.org/10.3901/JME.2023.24.108

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(24): 108-117 https://doi.org/10.3901/JME.2023.24.108

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