基于自修正系数和模糊PID的高端装备亚微米级不平衡振动靶向抑制方法

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机械工程学报 ›› 2023, Vol. 59 ›› Issue (13) : 184-192. DOI: 10.3901/JME.2023.13.184

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A Submicron Unbalance Vibration Targeted Suppression Method for High-end Equipment Based on Self-correcting Coefficient and Fuzzy PID

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2023, 59(13): 184-192 https://doi.org/10.3901/JME.2023.13.184

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(13): 184-192 https://doi.org/10.3901/JME.2023.13.184

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