基于“误差流”理论的精密线性平台微行程定位精度表征方法

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机械工程学报 ›› 2023, Vol. 59 ›› Issue (13) : 49-58. DOI: 10.3901/JME.2023.13.049

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Positioning Accuracy Characterization Approach in Micro-scale Displacement for Precise Linear Stage Based on Stream of Variation Theory

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2023, 59(13): 49-58 https://doi.org/10.3901/JME.2023.13.049

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(13): 49-58 https://doi.org/10.3901/JME.2023.13.049

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