纳米多孔氧化硅薄膜的表征及其基于UAFM弹性性能的检测

PDF(307 KB)

机械工程学报 ›› 2018, Vol. 54 ›› Issue (12) : 109-114. DOI: 10.3901/JME.2018.12.109

扫码查看或转发全文

作者信息 +

Characterization and Measurement of Elastic Modulus Based on Ultrasonic Atomic Force Microscopy for Nano-porous Silicon Oxide Film

Author information +

文章历史 +

导出引用

{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2018, 54(12): 109-114 https://doi.org/10.3901/JME.2018.12.109

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(12): 109-114 https://doi.org/10.3901/JME.2018.12.109

中图分类号：

原文顺序 | 文献年度倒序 | 文中引用次数倒序

PDF(307 KB)

Accesses

Citation

Detail

段落导航