基于纳米压痕和纳米冲击技术研究溅射功率对Ti薄膜力学性能的影响

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机械工程学报 ›› 2018, Vol. 54 ›› Issue (2) : 117-124. DOI: 10.3901/JME.2018.02.117

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Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2018, 54(2): 117-124 https://doi.org/10.3901/JME.2018.02.117

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(2): 117-124 https://doi.org/10.3901/JME.2018.02.117

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