TiN薄膜的残余应力调控及力学性能研究

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机械工程学报 ›› 2017, Vol. 53 ›› Issue (24) : 42-48. DOI: 10.3901/JME.2017.24.042

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TiN薄膜的残余应力调控及力学性能研究

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Study on Residual Stress Modulation and Mechanical Properties of Titanium Nitride Coatings

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2017, 53(24): 42-48 https://doi.org/10.3901/JME.2017.24.042

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 53(24): 42-48 https://doi.org/10.3901/JME.2017.24.042

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