厚度渐变结构介电性能测试用变间距叉指型相邻电容传感器设计

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机械工程学报 ›› 2017, Vol. 53 ›› Issue (18) : 1-9. DOI: 10.3901/JME.2017.18.001

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Design of Improved Interdigital Capacitive Proximity Sensor Used for Dielectric Property Detection of Thickness Gradual Changed Structure

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2017, 53(18): 1-9 https://doi.org/10.3901/JME.2017.18.001

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 53(18): 1-9 https://doi.org/10.3901/JME.2017.18.001

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