单晶SiC化学机械抛光液的固相催化剂研究

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机械工程学报 ›› 2017, Vol. 53 ›› Issue (21) : 167-173. DOI: 10.3901/JME.2017.21.167

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Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2017, 53(21): 167-173 https://doi.org/10.3901/JME.2017.21.167

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 53(21): 167-173 https://doi.org/10.3901/JME.2017.21.167

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