Design and Implementation of Sub-Micrometer High-Precision Laser Displacement Sensor

SUNJi-hong, WANGTing-jun, CHENTeng-fei

Manufacturing Automation ›› 2024, Vol. 46 ›› Issue (7) : 163-169.

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Manufacturing Automation ›› 2024, Vol. 46 ›› Issue (7) : 163-169. DOI: 10.3969/j.issn.1009-0134.2024.07.026

Design and Implementation of Sub-Micrometer High-Precision Laser Displacement Sensor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 46(7): 163-169 https://doi.org/10.3969/j.issn.1009-0134.2024.07.026

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