超精密机床热形变及其对运动精度的影响研究
陈熠, 王振忠, 雷鹏立, 施晨淳
Research on thermal deformation of ultra-precision machine tools with effect on motion accuracy
CHEN Yi, WANG Zhenzhong, LEI Pengli, SHI Chenchun
制造技术与机床 . 2023, (2): 5 -11 .  DOI: 10.19287/j.mtmt.1005-2402.2023.02.001