纳米级气体静压轴承回转误差测控系统软件开发
钱林弘, 冯艳冰, 张新疆, 雷大江, 蓝河, 崔海龙, 郑越青
Software development of measuring and controlling system for the rotation error of nano aerostatic bearing
QIAN Linhong, FENG Yanbing, ZHANG Xinjiang, LEI Dajiang, LAN He, CUI Hailong, ZHENG Yueqing
制造技术与机床
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2022, (6): 176
-180
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DOI: 10.19287/j.mtmt.1005-2402.2022.06.028
