Stripping Removal Mechanism of Ultrasonic Vibration-Assisted Cutting on Single-Crystal Silicon
RAN Di, YUAN Zewei, BIAN Siwen, DENG Xinhua, WANG Ning, LI Yuxin
Modular Machine Tool & Automatic Manufacturing Technique . 2023, (8): 163 -166,182 .  DOI: 10.13462/j.cnki.mmtamt.2023.08.035

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