Stripping Removal Mechanism of Ultrasonic Vibration-Assisted Cutting on Single-Crystal Silicon

RAN Di, YUAN Zewei, BIAN Siwen, DENG Xinhua, WANG Ning, LI Yuxin

Modular Machine Tool & Automatic Manufacturing Technique ›› 2023, Vol. 0 ›› Issue (8) : 163-166,182.

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Modular Machine Tool & Automatic Manufacturing Technique ›› 2023, Vol. 0 ›› Issue (8) : 163-166,182. DOI: 10.13462/j.cnki.mmtamt.2023.08.035

Stripping Removal Mechanism of Ultrasonic Vibration-Assisted Cutting on Single-Crystal Silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 0(8): 163-166,182 https://doi.org/10.13462/j.cnki.mmtamt.2023.08.035

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