超声振动辅助切削单晶硅的剥离去除机制
冉迪, 苑泽伟, 卞思文, 邓鑫华, 王宁, 李予欣
Stripping Removal Mechanism of Ultrasonic Vibration-Assisted Cutting on Single-Crystal Silicon
RAN Di, YUAN Zewei, BIAN Siwen, DENG Xinhua, WANG Ning, LI Yuxin
组合机床与自动化加工技术
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2023, (8): 163
-166,182
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DOI: 10.13462/j.cnki.mmtamt.2023.08.035
