Design and Laser Etching of Embedded Microchannels on AlN Substrate

MA Yupu, WEI Tao, WANG Li, ZHAO Junyi, ZHANG Xinlei, CHEN Ni, LI Liang, HE Ning

China Mechanical Engineering ›› 2023, Vol. 34 ›› Issue (20) : 2496-2503.

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China Mechanical Engineering ›› 2023, Vol. 34 ›› Issue (20) : 2496-2503. DOI: 10.3969/j.issn.1004-132X.2023.20.013

Design and Laser Etching of Embedded Microchannels on AlN Substrate

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 34(20): 2496-2503 https://doi.org/10.3969/j.issn.1004-132X.2023.20.013

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