Experimental Study of Laser Assisted Water Jet Micromilling of Single Crystal β-Ga2O3 Substrates

doi:10.3969/j.issn.1004-132X.2023.13.005

TIAN Long, HUANG Chuanzhen, LIU Dun , YAO Peng , LIU Hanlian, LIU Xuefei

China Mechanical Engineering ›› 2023, Vol. 34 ›› Issue (13) : 1559-1567.

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China Mechanical Engineering ›› 2023, Vol. 34 ›› Issue (13) : 1559-1567. DOI: 10.3969/j.issn.1004-132X.2023.13.005

Experimental Study of Laser Assisted Water Jet Micromilling of Single Crystal β-Ga2O3 Substrates

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 34(13): 1559-1567 https://doi.org/10.3969/j.issn.1004-132X.2023.13.005

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