Numerical Simulation and Experiments of SLAEs for Planar Polishing with Dielectrophoresis Effect

DENG Qianfa, CHENG Jun, LYU Binghai, , YUAN Julong, WANG Xu, CEN Kaidi,

China Mechanical Engineering ›› 2022, Vol. 33 ›› Issue (15) : 1772-1779，1793.

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China Mechanical Engineering ›› 2022, Vol. 33 ›› Issue (15) : 1772-1779，1793. DOI: 10.3969/j.issn.1004-132X.2022.15.002

Numerical Simulation and Experiments of SLAEs for Planar Polishing with Dielectrophoresis Effect

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 33(15): 1772-1779，1793 https://doi.org/10.3969/j.issn.1004-132X.2022.15.002

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