Probe Error Correction Method for Nano-precision On-machine Measurement Systems

GUO Xipeng, XU Wen, WANG Dingwen, LI Rong, YIN Shaohui

China Mechanical Engineering ›› 2022, Vol. 33 ›› Issue (09) : 1084-1089.

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China Mechanical Engineering ›› 2022, Vol. 33 ›› Issue (09) : 1084-1089. DOI: 10.3969/j.issn.1004-132X.2022.09.010

Probe Error Correction Method for Nano-precision On-machine Measurement Systems

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 33(09): 1084-1089 https://doi.org/10.3969/j.issn.1004-132X.2022.09.010

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