Research on Machinability of Laser Modified AlN Substrates

doi:10.3969/j.issn.1004-132X.2021.23.005

CHEN Ni, WEI Jiawei, ZHANG Xinlei, LI Liang, HE Ning

China Mechanical Engineering ›› 2021, Vol. 32 ›› Issue (23) : 2817-2882.

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China Mechanical Engineering ›› 2021, Vol. 32 ›› Issue (23) : 2817-2882. DOI: 10.3969/j.issn.1004-132X.2021.23.005

Research on Machinability of Laser Modified AlN Substrates

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 32(23): 2817-2882 https://doi.org/10.3969/j.issn.1004-132X.2021.23.005

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Received	Published
2021-06-23	2021-12-10
Issue Date
2021-12-23

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