Wafer Manufacturing Data Anomaly Detection Based on Error Attention

doi:10.3969/j.issn.1004-132X.2020.14.007

YU Shilong, BAO Jinsong, LI Jie, ZHANG Qihua

China Mechanical Engineering ›› 2020, Vol. 31 ›› Issue (14) : 1686-1692.

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China Mechanical Engineering ›› 2020, Vol. 31 ›› Issue (14) : 1686-1692. DOI: 10.3969/j.issn.1004-132X.2020.14.007

Wafer Manufacturing Data Anomaly Detection Based on Error Attention

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 31(14): 1686-1692 https://doi.org/10.3969/j.issn.1004-132X.2020.14.007

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Received	Published
2019-05-09	2020-07-25
Issue Date
2020-08-26

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