Wafer Acceptance Test Key Parameter Identification Based on Hybrid Feature Selection Method

doi:10.3969/j.issn.1004132X.2020.16.010 开放科学(资源服务)标识码(OSID)：

LYU Youlong, XU Hongwei, ZHENG Cheng, ZHANG Jie, ZHENG Peng

China Mechanical Engineering ›› 2020, Vol. 31 ›› Issue (16) : 1978-1984,1997.

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China Mechanical Engineering ›› 2020, Vol. 31 ›› Issue (16) : 1978-1984,1997. DOI: 10.3969/j.issn.1004132X.2020.16.010 开放科学(资源服务)标识码(OSID)：

Wafer Acceptance Test Key Parameter Identification Based on Hybrid Feature Selection Method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 31(16): 1978-1984,1997 https://doi.org/10.3969/j.issn.1004132X.2020.16.010 开放科学(资源服务)标识码(OSID)：

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Received	Published
2020-03-13	2020-08-25
Issue Date
2020-09-08

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