激光辅助水射流微铣削单晶β-Ga2O3衬底的实验研究
田龙, 黄传真, 刘盾, 姚鹏, 刘含莲, 刘雪飞
Experimental Study of Laser Assisted Water Jet Micromilling of Single Crystal β-Ga2O3 Substrates
TIAN Long, HUANG Chuanzhen, LIU Dun , YAO Peng , LIU Hanlian, LIU Xuefei
中国机械工程
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2023, (13): 1559
-1567
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DOI: 10.3969/j.issn.1004-132X.2023.13.005
