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ISSN 1674-5949 CN 31-2023/U
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中文
Research Progress of Crystalline Thin Films by High Power Impulse Magnetron Sputtering at a Low Temperature
BAI Xuebing, CAI Qun, ZHANG Xuhai
China Surface Engineering . 2022, (
5
): 105 -115 . DOI: 10.11933/j.issn.1007-9289.20211213002
