Effects of Current Density on Residual Resistivity Ratio of Electrodeposited Copper Films
ZHANG Shuai, LUO Jirun, WANG Xiaoxia, ZHANG Rui, WU Zhijie, FENG Haijiao
China Surface Engineering . 2021, (4): 60 -66 .  DOI: 10.11933/j.issn.1007-9289.20210201001