Structure and Properties of ZrAlYN Coating Deposited by Magnetron Sputtering

doi:10.3969/j.issn.1007-9289.2013.05.003

XIAN Guang, ZHAO Haibo, FAN Hongyuan, WANG Hui, DU Hao

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (5) : 12-17.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (5) : 12-17. DOI: 10.3969/j.issn.1007-9289.2013.05.003

Structure and Properties of ZrAlYN Coating Deposited by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(5): 12-17 https://doi.org/10.3969/j.issn.1007-9289.2013.05.003

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