Influence of Substrate Bias on Microstructure and Thermal Stability of AlCrSiON Coatings Deposited by Arc Ion Plating

doi:10.11933/j.issn.1007-9289.2016.06.009

GENG Dong-sen, WU Zheng-tao, NIE Zhi-wei, LI Hai-xu, ZHANG Xiao-bo, DAI Wei and WANG Qi-min

China Surface Engineering ›› 2016, Vol. 29 ›› Issue (6) : 60-66.

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China Surface Engineering ›› 2016, Vol. 29 ›› Issue (6) : 60-66. DOI: 10.11933/j.issn.1007-9289.2016.06.009

Influence of Substrate Bias on Microstructure and Thermal Stability of AlCrSiON Coatings Deposited by Arc Ion Plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 29(6): 60-66 https://doi.org/10.11933/j.issn.1007-9289.2016.06.009

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