Ultrasonic Elliptical Vibration Assisted Chemical Mechanical Polishing for Fiber Array

doi:10.11933/j.issn.1007-9289.2016.03.018

CHEN Tao, LIU De-fu, SHE Yi-xi and YAN Ri-ming

China Surface Engineering ›› 2016, Vol. 29 ›› Issue (3) : 132-138.

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China Surface Engineering ›› 2016, Vol. 29 ›› Issue (3) : 132-138. DOI: 10.11933/j.issn.1007-9289.2016.03.018

Ultrasonic Elliptical Vibration Assisted Chemical Mechanical Polishing for Fiber Array

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 29(3): 132-138 https://doi.org/10.11933/j.issn.1007-9289.2016.03.018

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