Structure and Properties of DLC Films Prepared by Linear Ion Source Technology

ZHOU Tao, YUAN Juntang, HUANG Lei, WANG Zhenhua

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (6) : 48-54.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (6) : 48-54. DOI: 10.11933/j.issn.1007-9289.2015.06.007

Structure and Properties of DLC Films Prepared by Linear Ion Source Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(6): 48-54 https://doi.org/10.11933/j.issn.1007-9289.2015.06.007

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