Effects of Deposition Pressure on Structure and Properties of TiCN Films by Hybrid Ion Plating

doi:10.11933/j.issn.1007-9289.2015.05.004

WANG Yu, HUANG Meidong, LI Yunke, CHEN Zehao, ZHANG Chen, YANG Mingmin

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (5) : 24-29.

PDF(1455 KB)

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (5) : 24-29. DOI: 10.11933/j.issn.1007-9289.2015.05.004

Effects of Deposition Pressure on Structure and Properties of TiCN Films by Hybrid Ion Plating

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(5): 24-29 https://doi.org/10.11933/j.issn.1007-9289.2015.05.004

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(1455 KB)

Accesses

Citation

Detail

Sections

Recommended

Please choose a citation manager

Content to export