Effects of Modulation Periods on Structure and Adhesion Strength of TiN/Ti Multilayer Films

doi:10.11933/j.issn.1007-9289.2015.02.006

XIAO Na, DU Feifei, YANG Bo

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (2) : 65-69.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (2) : 65-69. DOI: 10.11933/j.issn.1007-9289.2015.02.006

Effects of Modulation Periods on Structure and Adhesion Strength of TiN/Ti Multilayer Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(2): 65-69 https://doi.org/10.11933/j.issn.1007-9289.2015.02.006

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