Effects of Axial Magnetic Field on Microstructure and Mechanical Properties of TiN Films Deposited by Arc Ion Plating

doi:10.11933/j.issn.1007-9289.2015.01.009

ZHAO Yanhui^a, GUO Chaoqian^b, YANG Wenjin^b, CHEN Yuqiu^b, XIAO Jinquan^b, YU Baohai^a

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (1) : 56-61.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (1) : 56-61. DOI: 10.11933/j.issn.1007-9289.2015.01.009

Effects of Axial Magnetic Field on Microstructure and Mechanical Properties of TiN Films Deposited by Arc Ion Plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(1): 56-61 https://doi.org/10.11933/j.issn.1007-9289.2015.01.009

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