Mechanical Properties and Thermal Stability of TiAlN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition Obtains New Progress

doi:10.11933/j.issn.1007-9289.2014.06.018

SHANG Hongfei

China Surface Engineering ›› 2014, Vol. 27 ›› Issue (6) : 141-141.

PDF(1040 KB)

China Surface Engineering ›› 2014, Vol. 27 ›› Issue (6) : 141-141. DOI: 10.11933/j.issn.1007-9289.2014.06.018

Mechanical Properties and Thermal Stability of TiAlN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition Obtains New Progress

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 27(6): 141-141 https://doi.org/10.11933/j.issn.1007-9289.2014.06.018

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(1040 KB)

Accesses

Citation

Detail

Sections

Recommended

Please choose a citation manager

Content to export