HiPIMS制备TiB<sub>2</sub>、TiBN涂层及其等离子体性质

HiPIMS制备TiB₂、TiBN涂层及其等离子体性质

吴正涛，叶榕礼，李海庆，王启民

Fabrication and Plasma Properties of TiB2, TiBN Films by HiPIMS

WU Zhengtao, YE Rongli, LI Haiqing, WANG Qimin

中国表面工程 . 2022, (5): 228 -235 . DOI: 10.11933/j.issn.1007-9289.20220114001