磁控溅射法制备T型柔性薄膜热电偶*

磁控溅射法制备T型柔性薄膜热电偶*

熊智淳，张哲娟，凌彦萃

Preparation of T-type Flexible Thin Film Thermocouple by Magnetron Sputtering

XIONG Zhichun, ZHANG Zhejuan, LING Yancui

中国表面工程 . 2022, (1): 231 -236 . DOI: 10.11933/j.issn.1007-9289.20210416002