NiCr和TiAl合金靶材阴极电弧弧斑的运动特性

左帅,王浩琦,陈淑年,庞盼,廖斌

Motion Characteristics of Cathodic Arc Spots of NiCr and TiAl Alloy Targets

ZUO Shuai, WANG Haoqi, CHEN Shunian, PANG Pan and LIAO Bin

中国表面工程 . 2019, (3): 59 -68 . DOI: 10.11933/j.issn.1007-9289.20190228001