新型多弧磁过滤系统对TiAlN薄膜的组分调控

黄杰,史学伟,廖斌,吴先映

Composition Control of TiAlN Thin Film by A Novel Multi-arc Magnetic Filter System

HUANG Jie, SHI Xuewei, LIAO Bin and WU Xianying

中国表面工程 . 2019, (2): 27 -33 . DOI: 10.11933/j.issn.1007-9289.20181201001