氢气流量对大面积金刚石膜沉积的影响

孙祁,汪建华,刘繁,翁俊

Effects of Hydrogen Flow Rate on Deposition of Large Area Diamond Films

SUN Qi, WANG Jian-hua, LIU Fan and WENG Jun

中国表面工程 . 2018, (2): 75 -84 . DOI: 10.11933/j.issn.1007-9289.20171018002